Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1990-11-29

1993-02-16

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 361283, G01L 708, G01L 912

Patent

active

051860546

ABSTRACT:
A capacitive pressure sensor includes a set of facing electrodes arranged with a cavity disposed therebetween and having insulation layers respectively formed on the surfaces thereof. The contact area between the facing electrodes varies directly with the applied pressure, and variation in the contact area causes variation in the capacitance which is detected as a pressure measurement. Since the capacitance variation is proportional to the applied pressure, a pressure signal which is substantially linear can be obtained. Therefore, the capacitive pressure sensor of this invention can measure pressure with high precision.

REFERENCES:
patent: 3993939 (1976-11-01), Slavin et al.
patent: 4092696 (1978-05-01), Boesen et al.
patent: 4823230 (1989-04-01), Tiemann
patent: 4831492 (1989-05-01), Kuisma

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