Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1984-11-16

1986-09-16

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700, H01L 2984

Patent

active

046125990

ABSTRACT:
A pressure sensor comprises a measuring capacitor, of which the measuring electrode (7) is insulatedly applied to a silicon membrane (3) and the counterelectrode (18) is insulatedly applied to a silicon disc (2). The measuring electrode (7) and the counterelectrode (18) are surrounded by shielding electrodes (11, 21). The shielding electrodes (11, 21), as well as the silicon discs (1), are fed with a shielding voltage of which the electrical potential is the same as that of the measurement electrode (7). The two silicon discs (1, 2) are mechanically interconnected by bump connections (25, 29, 31, 32).

REFERENCES:
patent: 4178621 (1979-12-01), Simonelic et al.
patent: 4295376 (1981-10-01), Bell
patent: 4495820 (1985-01-01), Shimada et al.
59488 European Patent Application Sep. 1982, Hitachi.
IEEE Publication vol. ED-29 Jan. 1982, No. 1, pp. 48 to 56.

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