Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1991-07-01

1992-09-22

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700

Patent

active

051502755

ABSTRACT:
A capacitance pressure sensor includes a conductive diaphragm positioned between two pneumatically separate regions. The diaphragm is supported at its periphery by a concave base member. An electrode assembly establishes a substantially planar conductive surface opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a plurality of support legs extending through, and secured at, apertures in the base member.

REFERENCES:
patent: 4084438 (1978-04-01), Lee et al.
patent: 4168518 (1979-09-01), Lee
patent: 4358814 (1980-10-01), Lee et al.

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