Capacitive pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73718, 361283, G01L 708, G01L 912, H01G 700

Patent

active

045234744

ABSTRACT:
A capacitive sensor for use in the measurement of pressure or pressure changes of a fluid medium which sensor maintains the capacitor electrodes in a substantially parallel relationship. Maintenance of this parallel relationship provides a substantially linear capacitive output over a given range without further electronic buffering or calibration. The capacitive signal may be enhanced or amplified by use of multiple parallel plates which are movable simultaneously with deflection of the flexible diaphragm.

REFERENCES:
patent: 3479879 (1969-11-01), Music
patent: 3634727 (1972-01-01), Polye
patent: 3808480 (1974-04-01), Johnston
patent: 3858097 (1974-12-01), Polye
patent: 3859575 (1975-01-01), Lee et al.
patent: 3952234 (1976-04-01), Birchall
patent: 4064550 (1977-12-01), Dias et al.
patent: 4089036 (1978-05-01), Geronime
patent: 4125027 (1978-11-01), Clark
patent: 4295376 (1981-10-01), Bell
patent: 4434451 (1984-02-01), Delatorrie

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