Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1980-10-27

1982-11-09

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700

Patent

active

043588140

ABSTRACT:
A capacitive pressure sensor including a concave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predetermined distance from the diaphragm by an electrode support member coupled to the central base support.

REFERENCES:
patent: 4084438 (1978-04-01), Lee et al.
patent: 4158311 (1979-06-01), Yasuhara
patent: 4158517 (1979-09-01), Lee
patent: 4229776 (1980-10-01), Antikainen
Rosemont Eng. Bulletin 6626, Minneapolis, Minn., 1970, pp. 1-3.

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