Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

2005-12-02

2008-01-15

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S277000

Reexamination Certificate

active

07319581

ABSTRACT:
A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive silicon substrate so as to be bonded thereto; and a sealed chamber formed between the diaphragm and the fixed electrode. A conductive silicon member is buried in a part of the insulating substrate, a portion of the conductive silicon member is exposed toward a surface of the insulating substrate facing the sealed chamber so as to form the fixed electrode, and another portion of the conductive silicon member is exposed toward the other surface of the insulating substrate not facing the sealed chamber so as to form a lead electrode of the fixed electrode.

REFERENCES:
patent: 4609966 (1986-09-01), Kuisma
patent: 4996627 (1991-02-01), Zias et al.
patent: 5050034 (1991-09-01), Hegner et al.
patent: 6338284 (2002-01-01), Najafi et al.
patent: 6595064 (2003-07-01), Drewes et al.
patent: 2772111 (1998-04-01), None

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