Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

2005-07-05

2005-07-05

Pham, Hoai (Department: 2814)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000

Reexamination Certificate

active

06912910

ABSTRACT:
A pressure sensor includes a capacitive pressure sensor chip mounted with the intervention of a sealing member on a base adaptor so as to be detachable. The sensor chip being constructed in a manner that a second substrate with a diaphragm electrode is placed between a first substrate with a fixed electrode and a third substrate with a pressure inlet and is bonded to the first and the third substrate so as to overlap the fixed electrode, the diaphragm electrode and the pressure inlet with a prescribed gap between the fixed electrode and the diaphragm electrode. Moreover, the third substrate is larger than the second substrate to make place which extends outside the second substrate and plays a role as a sealing surface to be in contact with the sealing member, and the sealing surface is pressed to the base adaptor with the intervention of the sealing member.

REFERENCES:
patent: 6598483 (2003-07-01), Miyashita et al.
patent: 6647794 (2003-11-01), Nelson et al.
patent: 08-035899 (1996-02-01), None
patent: 2001-201417 (2001-07-01), None

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