Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

2008-06-03

2008-06-03

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S280000

Reexamination Certificate

active

07382599

ABSTRACT:
A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a projection passing through the glass substrate to be exposed at the one surface. A second silicon substrate is bonded to the one surface of the glass substrate and is disposed to face the fixed electrode so as to form a cavity between the second silicon substrate and the fixed electrode.

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Search Report dated Jan. 10, 2007 for corresponding European Patent Application No. 06 02 2314.

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