Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

2008-07-22

2008-07-22

Thompson, Jewel V (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07401524

ABSTRACT:
In a capacitance type pressure sensor (1) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion (101) formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion (102) formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion (102).

REFERENCES:
patent: 5561247 (1996-10-01), Mutoh et al.
patent: 5992240 (1999-11-01), Tsuruoka et al.
patent: 6122973 (2000-09-01), Nomura et al.
patent: 2815279 (1998-08-01), None
International Search Report for International Application No. PCT/JP2005/008699 dated Jun. 14, 2005.

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