Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1992-12-22

1994-09-20

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700

Patent

active

053494920

ABSTRACT:
A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire. The first and second substrates are bonded to each other at a temperature lower than the melting point of the substrate material without forming any bonding layer.

REFERENCES:
patent: 4064549 (1977-12-01), Cretzler
patent: 4084438 (1978-04-01), Lee et al.
patent: 4410872 (1983-10-01), Stecher et al.
patent: 4572000 (1986-02-01), Kooiman
patent: 4972717 (1990-11-01), Southworth et al.
patent: 5201228 (1993-04-01), Kojima et al.
C. Y. Lee et al. "Quartz Capsule Pressure Transducer for the Automotive Industry" published by Society of Automotive Engineers Inc., Feb. 23-27, 1981.

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