Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1979-07-23

1981-03-24

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

361283, G01L 912

Patent

active

042572746

ABSTRACT:
A capacitive pressure sensor is provided which has a conductive silicon diaphragm having a thick supporting portion at the periphery thereof and a thin inner deflecting portion which is reduced in thickness from the supporting portion by means of an etching process which makes possible a very accurate dimensioning of the hollow formed by the deflecting portion of the diaphragm. A substrate of borosilicate glass has a flat surface which is placed against the side of the diaphragm in contact with the supporting portion and the two elements are joined by a process of anodic bonding so that a pressure chamber is formed between the substrate and the thin deflecting portion of the diaphragm. Within the pressure chamber, a thin electrode is provided on the surface of the substrate thereby forming electrostatic capacity between the substrate and the diaphragm and a hole is provided through the substrate for supplying of fluid into the pressure chamber.

REFERENCES:
patent: 3232114 (1966-02-01), Ferran
patent: 3397278 (1968-08-01), Pomerantz
patent: 3405559 (1968-10-01), Moffatt
patent: 3697918 (1972-10-01), Orth et al.
patent: 3748571 (1973-07-01), Kurtz
patent: 3793885 (1974-02-01), Frick
patent: 3800264 (1974-03-01), Kurtz

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