Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1979-10-29

1982-03-30

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

361282, H01G 700, H01G 534

Patent

active

043227759

ABSTRACT:
The disclosure relates to a capacitive pressure transducers which includes a flexible diaphragm. The flexibility of the diaphragm varies with temperature and thus different capacitance values result from the same pressures at different temperatures. To compensate for the variance of flexibility and capacitance values parts of the transducer are chosen with respect to specific temperature of coefficients.

REFERENCES:
patent: 4091683 (1978-05-01), Delatorre
patent: 4158311 (1979-06-01), Yasuhara
patent: 4196632 (1980-04-01), Sikorra

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