Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

1988-04-19

1989-09-05

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700, G01L 912

Patent

active

048644633

ABSTRACT:
A dual capacitive pressure sensor includes matched variable capacitors which are immune to vibration and acceleration, but which respond equally to changes in external fluid pressure level. The structure of the sensor is configured to avoid calibration drift as the sensor ages, as well as to provide electrical shielding for the variable capacitors of the sensor.

REFERENCES:
patent: 3232114 (1966-02-01), Ferran
patent: 3697835 (1972-10-01), Satori
patent: 3962921 (1976-06-01), Lips
patent: 3965746 (1976-06-01), Rabek
patent: 4689999 (1987-09-01), Shkedi

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