Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1997-04-10
1999-08-24
Felber, Joseph L.
Measuring and testing
Fluid pressure gauge
Diaphragm
3612834, 324661, 324680, G01L 912, G01R 2726
Patent
active
059426926
ABSTRACT:
A capacitive pressure sensor includes a chamber coupled to a region whose pressure is to be determined. The sensor includes a conductive flexible diaphragm and a pair of electrodes, each defining a capacitance with the diaphragm. Variations in pressure in the chamber cause deflection of the diaphragm which in turn causes variation in the capacitances. A processing circuit applies an excitation signal to the capacitances and couples the capacitances to inductive elements. A current through the inductive elements is detected to determine the difference in the sensor capacitances and, therefore, the deflection of the diaphragm and the pressure in the chamber.
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Chizinski Paul M.
Haase Wayne C.
Lahey Kerry S.
Mindlin Leonid
Felber Joseph L.
MKS Instruments Inc.
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