Capacitive pressure measuring arrangement having protection agai

Measuring and testing – Fluid pressure gauge – Diaphragm

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73756, 3612834, G01L 912

Patent

active

058774246

ABSTRACT:
This pressure measuring arrangement (10), which is both proof against the coupling-in of interference signals and satisfies the specifications relating to explosion protection, comprises a capacitive, ceramic pressure sensor (11) which has a substrate (12) having at least one electrode applied thereto and an associated diaphragm (13) having a counter-electrode applied thereto. Electrical contact can be made with the electrode and counter-electrode at the rear side (121) of the substrate, on which rear side is arranged a converter circuit (14) for capacitance changes which are caused by pressure changes. A current output circuit (17) is arranged inside the metallic housing (15) having a wall (151), a bottom (152) and an opening (153) which is situated opposite to the latter and into which the pressure sensor (11) is inserted in a pressure-tight manner, which current output circuit converts an output signal of the converter circuit (14) into a direct current which is proportional to the capacitance change and flows in two output lines (18, 19) which pass in an insulated manner through the bottom (152). A shielding electrode (20) which is arranged inside the housing (15) in an insulated manner with respect to the wall (151) is coupled at low impedance to one of the two output lines. The interior of the housing (15) is completely filled with a potting compound (25).

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patent: 5257210 (1993-10-01), Schneider et al.
patent: 5451940 (1995-09-01), Schneider et al.
Endress + Hauser, "Pressure Transmitter--cerabar PMC 133", Technical Information Brochure, pp. 1-8, date unknown.

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