Capacitive pressure detector structure and method for manufactur

Details Capacitive pressure detector structure and method for manufactur Capacitive pressure detector structure and method for manufactur

1985-06-05

1986-06-24

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, 73718, H01G 700, G01L 912

Patent

active

045970270

ABSTRACT:
Described herein are a capacitive pressure detector, with an electrically conductive substrate (1), an electrically conductive, plate-like member (3) disposed at a distance from the substrate, and an electrically insulating layer (2') hermetically bonding together the substrate (1) and the member (3) such that a capacitor chamber is formed between the substrate (1) and the member (3), as well as a method for manufacturing same. The method comprises machining at least one recess (5) into one side of the substrate (1), applying a layer (2) of electrically insulating material in molten state onto the machined side of the substrate (1) such that the layer (2) covers the machined side of the substrate, allowing the layer (2) to harden, remowing material out of the surface of the structure in this way produced for obtaining a substantially plane surface with at least one conductive mesa portion (6) of the substrate (1) surrounded by at least one insulating layer portion (2').

REFERENCES:
patent: 2438592 (1948-03-01), White
patent: 2868894 (1959-01-01), Schultz
patent: 4257274 (1981-03-01), Shimaoa et al.
patent: 4360955 (1982-11-01), Block
patent: 4405970 (1983-09-01), Swindal et al.
patent: 4424713 (1984-01-01), Kroninger et al.

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