Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1985-02-15
1986-05-13
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
73718, H01G 700, G01L 912
Patent
active
045890544
ABSTRACT:
A capacitive pressure detector, which comprises a support plate (5, 6; 19), a stationary capacitor plate (4; 7) disposed on the support plate, (5, 6; 19), and a silicon plate (2; 13) disposed on the support plate (5, 6; 19) so that it surrounds the stationary capacitor plate (4; 7), the middle portion of the silicon plate having been made thinner so that it forms membrane-like structure (3; 16) acting as a mobile capacitor plate. The support plate consists of a silicon layer (6; 21) and of a glass layer (5; 20) attached onto said silicon layer and placed against the silicon plate (2; 13), said glass layer being essentially thinner than the silicon layer. Hence, in the combination plate (5, 6; 20, 21) in this way obtained, owing to the elasticity coefficients and thermal expansion coefficients of the different layers (5 and 6; 20 and 21), the difference in thermal expansion between the combination plate (5, 6; 20, 21) and the silicon membrane (3; 16) is essentially reduced.
REFERENCES:
patent: 4158217 (1979-06-01), Bell
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4386453 (1983-06-01), Giachino et al.
patent: 4390925 (1983-06-01), Freud
patent: 4467394 (1984-08-01), Grantham et al.
Griffin Donald A.
Vaisala Oy
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