Capacitive pressure detector

Details Capacitive pressure detector Capacitive pressure detector

1985-02-15

1986-06-10

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700, G01L 912

Patent

active

045946396

ABSTRACT:
A capacitive pressure detector, comprising a plate-shaped base (13), a stationary capacitor plate (14) disposed on the base (13), an aneroid capsule (6) arranged in connection with the base (13) and proviced with an area (8) with a mobile capacitor plate facing the stationary capacitor plate (14) and changing its distance from the stationary capacitor disc (14) by the effect of pressure. On the plate-shaped base (13), a silicon plate (5) is disposed, into which a membrane-like middle portion (8) functioning as the mobile capacitor plate has been worked. On the silicon plate (5), a preferably plate-shaped cover structure (12) is hermetically disposed so that a basin space (6) of the aneroid capsule is formed between the cover structure (12) and said middle portion (8). The membrane-like middle portion (8) of the silicon plate (5) is connected to the edge portion of the silicon plate (5) by means of a relatively thin-walled collar structure (11) extending from the edge of the middle portion (8) to the proximity of the inner face of the cover structure (12).

REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 3965746 (1976-06-01), Rabek
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4386453 (1983-06-01), Giachino et al.
patent: 4390925 (1983-06-01), Freud
patent: 4467394 (1984-08-01), Grantham et al.
IEEE Transactions on Electron Devices, vol. ED-25 (1978), No. 10, pp. 1185-1193.

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