Capacitive position sensing in an electrostatic micromotor

Details Capacitive position sensing in an electrostatic micromotor Capacitive position sensing in an electrostatic micromotor

2011-03-01

2011-03-01

Mullins, Burton (Department: 2834)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S658000, C324S660000, C310S309000

Reexamination Certificate

active

07898267

ABSTRACT:
An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.

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