Capacitive pick-off and electrostatic rebalance...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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C073S514210

Reexamination Certificate

active

06935175

ABSTRACT:
A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

REFERENCES:
patent: 4945765 (1990-08-01), Roszhart
patent: 5006487 (1991-04-01), Stokes
patent: 5905203 (1999-05-01), Flach et al.
patent: 6631641 (2003-10-01), Schalk et al.
patent: 2002/0189355 (2002-12-01), Leonardson
patent: 2004/0160232 (2004-08-01), Yue et al.

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