Capacitive microsensor

Details Capacitive microsensor Capacitive microsensor

2006-10-31

2006-10-31

Mehta, Bhavesh M. (Department: 2624)

Image analysis

Applications

Personnel identification

C356S071000, C348S294000, C438S524000

Reexamination Certificate

active

07130455

ABSTRACT:
A capacitive microsensor formed on a wafer, including a conductive detection area arranged on a first surface or front surface of the wafer; a conductive via crossing the wafer and emerging on said area; and a structure to ensure contact with said via on the second surface or rear surface of the wafer.

REFERENCES:
patent: 5270710 (1993-12-01), Gaultier et al.
patent: 5757081 (1998-05-01), Chang et al.
patent: 5778089 (1998-07-01), Borza
patent: 5862248 (1999-01-01), Salatino et al.
patent: 5956415 (1999-09-01), McCalley et al.
patent: 6088471 (2000-07-01), Setlak et al.
patent: 6307258 (2001-10-01), Crane et al.
patent: 6317508 (2001-11-01), Kramer et al.
patent: 6563215 (2003-05-01), Akram et al.
patent: 6838362 (2005-01-01), Mastromatteo et al.
patent: 2001/0043728 (2001-11-01), Kramer et al.
French Search Report from French Patent Application 01/03471, filed Mar. 14, 2001.

Affiliated with

Also associated with

Rating

Capacitive microsensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive microsensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive microsensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3630306