Capacitive microphone and method therefor

Details Capacitive microphone and method therefor Capacitive microphone and method therefor

1996-07-02

1999-03-30

Le, Huyen

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

381191, 437209, H04R 2500

Patent

active

058898727

ABSTRACT:
A capacitive microphone (10) utilizes a polysilicon diaphragm (14) that overlies an atmospheric cavity (34). The diaphragm is doped and annealed to form a sensitivity of the microphone (10). A silicon cap covers and protects the diaphragm (14) and a fixed plate (18).

REFERENCES:
patent: 5188983 (1993-02-01), Guckel et al.
patent: 5452268 (1995-09-01), Bernstein
J. Bernstein et al., "Advanced Micromachined Condenser Hydrophone", Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, Jun. 1994, pp. 73-77.
J. Bernstein, "A Micromachined Condenser Hydrophone", 1992 IEEE, pp. 161-165.
J. Bergqvist et al., "A Silicon Condenser Microphone with a Highly Perforated Backplate", 1991 IEEE, pp. 266-269.
J. Kung et al., "An Integrated Air-Gap-Capacitor Pressure Sensor and Digital Readout with Sub-100 Attofarad Resolution", Journal of Microelectromechanical Systems, vol. 1, No. 3, Sep. 1992, pp. 121-129.

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