Capacitive microphone and method for making the same

Details Capacitive microphone and method for making the same Capacitive microphone and method for making the same

2011-03-22

2011-03-22

Nguyen, Tuan D (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S175000

Reexamination Certificate

active

07912235

ABSTRACT:
A capacitive microphone and method for making the same are provided. A backplate with a plurality of holes is formed on a substrate with at least one cavity, and a diaphragm is formed above the backplate. There is an air gap between the backplate and the diaphragm. The air gap and the cavity communicate with each other by each hole. The diaphragm and the backplate are separated by a first distance and a second distance which is smaller than the first distance, such that the difference is formed on the diaphragm. The second distance area is fastened through surface stiction produced by mist or other fluids.

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patent: 11-127498 (1999-05-01), None

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