Capacitive micromachined acoustic transducer

Details Capacitive micromachined acoustic transducer Capacitive micromachined acoustic transducer

2006-12-26

2006-12-26

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C381S176000

Reexamination Certificate

active

07152481

ABSTRACT:
A micromachined capacitive acoustic transducer including an electrode formed by a perforated plate and another electrode formed by a shallowly corrugated membrane anchored at one or more positions on the substrate which also supports the said perforated plate is described. Also disclosed includes: a fixed perforated plate; a movable shallowly corrugated membrane having holes to form acoustic filter to a certain frequency or a range of frequencies spaced from the perforated plate that is anchored in one or more location but loose at other locations; a support structure in the perforated plate maintaining the minimum separation between the membrane and the perforated plate near the perimeter.

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