Capacitive micro-sensor with a low stray capacity and manufactur

Details Capacitive micro-sensor with a low stray capacity and manufactur Capacitive micro-sensor with a low stray capacity and manufactur

1993-02-19

1995-01-10

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

3612832, 3612834, 73517R, G01P 15125

Patent

active

053813006

ABSTRACT:
A capacitive micro-sensor includes a sandwich of three silicon wafers, a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer. At least one of the external plates forms a first electrode, the central plate forms a second electrode and at least one portion of the central plate forms a variable capacity with at least one of the external layers. At least one of the insulating layers is formed by a sandwich of a first insulating layer, a conductive layer and a second insulating layer, the conductive layer being associated with connection means.

REFERENCES:
patent: 4257274 (1981-03-01), Shimada
patent: 4930043 (1990-05-01), Wiegano
patent: 5006487 (1991-04-01), Stokes
patent: 5228341 (1993-07-01), Tsuchitani

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