Capacitive micro-sensor with a lateral protection and manufactur

Details Capacitive micro-sensor with a lateral protection and manufactur Capacitive micro-sensor with a lateral protection and manufactur

1993-02-19

1995-05-23

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2541, H01G 700

Patent

active

054186811

ABSTRACT:
A capacitive micro-sensor includes a sandwich of at least two silicon plates. A peripheral stripe of each side of one plate is assembled to a corresponding stripe of the opposing surface of an adjacent plate through an insulating layer. The lateral sides of the sandwich are provided with notches partially penetrating in each of the insulating layers, and are thicker than the thickness of the insulating layers.

REFERENCES:
patent: 4875134 (1989-10-01), Kuisma
patent: 4879627 (1989-11-01), Grantham
patent: 4951174 (1990-08-01), Grantham
patent: 5095752 (1992-03-01), Suzuki et al.

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