Capacitive micro pressure sensing member and fingerprint...

Image analysis – Applications – Personnel identification

Reexamination Certificate

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Reexamination Certificate

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10638371

ABSTRACT:
A capacitive micro pressure sensing member and a fingerprint sensor using the same. The sensing member includes a substrate, a first suspended structure, a first protrusion structure, and a second suspended structure. The first suspended structure is located above the substrate and includes a suspended thin plate and at least one compliant suspension arm connected to the suspended thin plate, which is movable so that a distance from the suspended thin plate to the substrate is changed. The first protrusion structure is arranged at a center portion of a top surface of the suspended thin plate. The second suspended structure is arranged on a top surface of the first protrusion structure with a center portion of the second suspended structure contacting the first protrusion structure. The second suspended structure covers the first suspended structure to form a sealed chamber together with the substrate.

REFERENCES:
patent: 5940526 (1999-08-01), Setlak et al.
patent: 6671392 (2003-12-01), Shigematsu et al.
patent: 6683971 (2004-01-01), Salatino et al.
patent: 6889565 (2005-05-01), DeConde et al.
patent: 7013031 (2006-03-01), Kim et al.

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