Capacitive MEMS device with programmable offset voltage control

Details Capacitive MEMS device with programmable offset voltage control Capacitive MEMS device with programmable offset voltage control

2011-07-12

2011-07-12

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S230000

Reexamination Certificate

active

07978395

ABSTRACT:
A capacitive MEMS device is formed having a material between electrodes that traps and retains charges. The material can be realized in several configurations. It can be a multilayer dielectric stack with regions of different band gap energies or band energy levels. The dielectric materials can be trappy itself, i.e. when defects or trap sites are pre-fabricated in the material. Another configuration involves a thin layer of a conductive material with the energy level in the forbidden gap of the dielectric layer. The device may be programmed (i.e. offset and threshold voltages pre-set) by a method making advantageous use of charge storage in the material, wherein the interferometric modulator is pre-charged in such a way that the hysteresis curve shifts, and the actuation voltage threshold of the modulator is significantly lowered. During programming phase, charge transfer between the electrodes and the materials can be performed by applying voltage to the electrodes (i.e. applying electrical field across the material) or by UV-illumination and injection of electrical charges over the energy barrier. The interferometric modulator may then be retained in an actuated state with a significantly lower actuation voltage, thereby saving power.

REFERENCES:
patent: 4954789 (1990-09-01), Sampsell
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5838484 (1998-11-01), Goossen
patent: 5966235 (1999-10-01), Walker et al.
patent: 6040937 (2000-03-01), Miles
patent: 6574033 (2003-06-01), Chui et al.
patent: 6657832 (2003-12-01), Williams et al.
patent: 6674562 (2004-01-01), Miles et al.
patent: 6680792 (2004-01-01), Miles
patent: 7123216 (2006-10-01), Miles
patent: 7136213 (2006-11-01), Chui
patent: 7161728 (2007-01-01), Sampsell et al.
patent: 7327510 (2008-02-01), Cummings et al.
patent: 7667884 (2010-02-01), Chui
patent: 7729036 (2010-06-01), Felnhofer et al.
patent: 2002/0015215 (2002-02-01), Miles
patent: 2002/0036304 (2002-03-01), Ehmke et al.
patent: 2004/0051929 (2004-03-01), Sampsell et al.
patent: 2004/0058532 (2004-03-01), Miles et al.
patent: 2005/0012577 (2005-01-01), Pillans et al.
patent: 2006/0049826 (2006-03-01), Daneman et al.
patent: 2006/0066541 (2006-03-01), Gally et al.
patent: 2006/0109539 (2006-05-01), Katoh et al.
patent: 2006/0187522 (2006-08-01), Jilani et al.
patent: 2010/0079421 (2010-04-01), Chui
Miles, MEMS-based interferometric modulator for display applications, Part of the SPIE Conference on Micromachined Devices and Components, 3876:20-28 (1999).
Miles et al., 2000, 5.3: Digital Paper™: Reflective displays using interferometric modulation, SID Digest, vol. XXXI, pp. 32-35.
ISR and WO for PCT/US08/082894, filed Nov. 7, 2008.
Office Action in U.S. Appl. No. 11/938,673 dated Jun. 19, 2009.
IPRP for PCT/US08/082894, filed Nov. 7, 2008.

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