Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1983-12-19
1985-02-19
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
733365, H01G 520
Patent
active
045009406
ABSTRACT:
The present publication describes a capacitive humidity sensor and a method for the manufacture of same. The sensor comprises a substrate (1), first (5) and second bottom electrodes (4), which have been fitted close to each other on the substrate (1), an active layer (7), which fills the area between the first (5) and the second bottom electrodes (4) on the substrate (1) and extends to above the top face of the second electrode (4). According to the invention, the sensor further consists of structures (6) connected to the top face of the first electrode (5), made of a conductive material, and being beam-shaped with an upwardly widening section and being placed side by side, the said structures (6) limiting portions (7) of the active layer between themselves from two sides, and a narrow slot (26) being provided between the top faces of the said structures. Owing to its construction, the sensor is not sensitive to touching.
REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 3983527 (1976-09-01), Ohsato et al.
patent: 4167725 (1979-09-01), Shimizu et al.
Jalava Jouko S.
Kuisma Heikki T.
Lehto Ari
Griffin Donald A.
Vaisala Oy
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