Capacitive humidity sensor

Details Capacitive humidity sensor Capacitive humidity sensor

2007-02-08

2008-12-30

Gutierrez, Diego (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S689000, C073S335040

Reexamination Certificate

active

07471093

ABSTRACT:
A capacitive humidity sensor includes a detecting portion and a reference portion. The detecting portion includes a first sensor element, and a capacitance of the first sensor element varies in accordance with humidity. The reference portion includes a second sensor element and a capacitor. The second sensor element is connected to the first sensor element in series, and a capacitance of the second sensor element varies in accordance with the humidity. The capacitor has a constant capacitance relative to a humidity variation. The first sensor element has a gradient of a capacitance variation to the humidity variation, which is different from a gradient of the second sensor element.

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