Capacitive humidity sensor

Details Capacitive humidity sensor Capacitive humidity sensor

1990-06-13

1991-09-24

Williams, Hezron E.

Measuring and testing

Gas analysis

Moisture content or vapor pressure

73 2905, 361286, G01W 100

Patent

active

050504347

ABSTRACT:
A capacitive humidity sensor includes a capacitor with two metallic electrodes 12, 15, with electrode 15 formed of a moisture-permeable metallic layer. A moisture-sensitive polymer film 14 situated between the electrodes serves as a dielectric. The film 14 is advantageously chosen to be polyether imide.

REFERENCES:
patent: 4564882 (1986-01-01), Baxter et al.
patent: 4672506 (1987-06-01), Deguchi et al.
patent: 4761710 (1988-08-01), Chen
patent: 4920451 (1990-04-01), Sakai et al.
patent: 4965698 (1990-10-01), Thoma et al.
"Dunnschicht-Feuchtesensoren" by Von Dr. U. Demisch, Messen Prufen Automatisieren, Sep. 1989.
"Marktubersicht: Dunnschicht-Feuchtesensoren" by U. Demisch Elektronisches Messen Physikalischer und Chemischer Werte Sensor Magazine, No. 3 vol. Sep. 5, 1989.

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