Capacitive gauge

Electricity: measuring and testing – Conductor identification or location – Inaccessible

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324 61P, G01R 2726

Patent

active

043474780

ABSTRACT:
Multiple terminal capacitor consisting of two opposite electrode plates, at least one thereof being sub-divided into a plurality of sub-electrodes separated from each other by small gaps, said sub-electrodes each forming with an area of the opposite electrode plate an individual sub-capacitor of the plate-capacitor or cross-capacitor type, said sub-capacitors being connected to circuitry such that any individual sub-electrode of a sub-divided electrode plate together with its related electrode area of the opposite electrode plate constitutes with the surrounding sub-electrodes and their related opposite electrode areas a sub-capacitor system of the Kelvin Guard-ring capacitor type, and such that the cooperation of at least two of the sub-capacitor space systems allows the measurement of any deviation in the plan-parallelity between two surfaces or in the angular coincidence with an accuracy of 1:10.sup.6 or better.

REFERENCES:
patent: 3084558 (1963-04-01), Wilcox et al.
patent: 3119266 (1964-01-01), Atkinson
patent: 3515987 (1970-06-01), Zurbrick et al.
patent: 3739265 (1973-06-01), Skildum
patent: 3805150 (1974-04-01), Abbe
patent: 3812424 (1974-05-01), Abbe
patent: 4025846 (1977-05-01), Franz et al.
patent: 4092579 (1978-05-01), Weit

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