Capacitive dynamic quantity sensor device

Details Capacitive dynamic quantity sensor device Capacitive dynamic quantity sensor device

2005-08-30

2005-08-30

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S280000

Reexamination Certificate

active

06935176

ABSTRACT:
A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).

REFERENCES:
patent: 6030850 (2000-02-01), Kurle et al.
patent: 6065341 (2000-05-01), Ishio et al.
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6313529 (2001-11-01), Yoshihara et al.
patent: 2002/0019079 (2002-02-01), Kawai
patent: A-11-121767 (1999-04-01), None

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