Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1994-01-24
1995-10-10
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
G01P 15125
Patent
active
054561116
ABSTRACT:
A micromachined vibrating beam accelerometer provides an acceptable mechanical Q at pressures above vacuum. Electrodes are formed on the beams for connection to a source of excitation voltage. In addition, electrodes are formed on a pick-off capacitance plate disposed adjacent the vibrating beams. The electrodes formed on the pick-off capacitance plate form capacitors with the electrodes formed on the beam. The output signals from these capacitors are connected in a feedback loop to the source of excitation voltage to form a relatively simple oscillator. In order to reduce the squeeze film damping, the pick-off capacitance plate is formed with grooves along one edge adjacent the vibrating beams. The grooves, which may be formed by either isotropic or reactive ion etching, reduce the squeeze film damping resulting from the vibratory motion to obviate the need to operate the vibrating beam accelerometer in a vacuum. As such, the vibrating beam accelerometer in accordance with the present invention is capable of providing an acceptable mechanical Q at pressures above vacuum, for example, up to one atmosphere. By obviating the need for the vibrating beams to operate in a vacuum, the cost of the housing for the accelerometer is significantly reduced.
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Allied-Signal Inc.
Massung Howard G.
Oda Christine K.
Williams Hezron E.
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