Capacitive discharge plasma ion source

Details Capacitive discharge plasma ion source Capacitive discharge plasma ion source

2007-09-25

2007-09-25

Owens, Douglas W. (Department: 2821)

Radiant energy

Ionic separation or analysis

With sample supply means

C250S286000

Reexamination Certificate

active

10215251

ABSTRACT:
In a system for chemical analysis, an RF-driven plasma ionization device including a pair of spaced-apart and plasma-isolated electrodes, the electrodes are connected to a power source wherein the electrodes act as plates of a capacitor of a resonant circuit, the gas electrically discharges and creates a plasma of both positive and negative ions, and the voltage is applied as a continuous alternating waveform or as a series of pulses, such as a packet waveform.

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