Capacitive differential pressure sensor and method of measuring

Details Capacitive differential pressure sensor and method of measuring Capacitive differential pressure sensor and method of measuring

1993-05-03

1994-10-25

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73152, 3612833, 3612834, G01L 912

Patent

active

053578066

ABSTRACT:
A capacitive differential pressure sensor comprises two end pieces and a central diaphragm all of the same type of electrically non-conductive material, such as quartz. As the central diaphragm moves relative to the end pieces in response to pressures applied through the end pieces, capacitance changes are sensed through one pair of facing electrodes on one end piece and the diaphragm and another pair of facing electrodes on the other end piece and the diaphragm. A method of measuring differential pressures at an oil or gas well with such a sensor is also disclosed.

REFERENCES:
patent: 4020448 (1977-04-01), Corbett
patent: 4067241 (1978-01-01), Corbett
patent: 4439705 (1984-03-01), Corbett
patent: 4485323 (1984-11-01), Corbett
patent: 4996627 (1991-02-01), Zias et al.
patent: 5019783 (1991-05-01), Cadwell
patent: 5048165 (1991-09-01), Cadwell
patent: 5157973 (1992-10-01), Ciminelli

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