Capacitive differential pressure detector

Details Capacitive differential pressure detector Capacitive differential pressure detector

1997-06-27

1999-07-20

Oen, William L.

Measuring and testing

Fluid pressure gauge

Diaphragm

G01L 912

Patent

active

059258241

ABSTRACT:
In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.

REFERENCES:
patent: 4390925 (1983-06-01), Freund
patent: 5056369 (1991-10-01), Tamai et al.

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