Capacitive differential pressure detector

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73724, 361283, G01L 708, G01L 912

Patent

active

050563696

ABSTRACT:
The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.

REFERENCES:
patent: 3697835 (1972-10-01), Satori
patent: 4358814 (1982-11-01), Lee et al.
patent: 4581676 (1986-04-01), Baxter et al.
patent: 4903532 (1990-02-01), Tamai et al.
patent: 4905575 (1990-03-01), Knecht et al.

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