Capacitive detector for transducers

Details Capacitive detector for transducers Capacitive detector for transducers

1984-01-20

1986-04-29

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73517B, 7386264, 324 61R, 34087037, G01L 108, G01L 114

Patent

active

045848858

ABSTRACT:
Displacement of a movable transducer element is measured by exciting a capacitive gap (preferably differential capacitive gaps) with triangular waves of voltage to obtain a square current wave output into a zero input impedance amplifier. The square wave output is amplified and synchronously detected to produce a d.c. output signal proportional to displacement. The d.c. output signal is fed back to force rebalance electrodes to electrostatically rebalance the movable transducer element. The feedback signal is a measure of the force being transduced. Initial offsets in the position of the transducer element and capacitances of the capacitive gaps are compensated by signals derived from the capacitive gap excitation waveforms.

REFERENCES:
patent: 3209601 (1965-10-01), Stiles
patent: 3229530 (1966-01-01), Wilcox et al.
patent: 3845377 (1974-10-01), Shimotori
patent: 3877313 (1975-04-01), Ferriss
patent: 4122708 (1978-10-01), Maier
patent: 4336718 (1982-06-01), Washburn

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