Capacitive detector for absolute pressure

Details Capacitive detector for absolute pressure Capacitive detector for absolute pressure

1985-02-15

1986-12-09

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, G01L 912, H01G 516

Patent

active

046284036

ABSTRACT:
A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).

REFERENCES:
patent: 4158217 (1979-06-01), Bell
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4390925 (1983-06-01), Freud

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