Capacitive based pressure sensor design

Details Capacitive based pressure sensor design Capacitive based pressure sensor design

1998-02-04

2000-02-29

Oen, William

Measuring and testing

Fluid pressure gauge

Diaphragm

G01L 912

Patent

active

060295252

ABSTRACT:
The disclosed pressure transducer assembly includes a first body, a second body, a diaphragm, and an electrode. The first body induces a case, one or more spokes, and a hub. The case has an interior surface. Each of said spokes extends from a first end to a second end. The first end of each spoke contacts the interior surface and the second end of each spoke contacts the hub. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. A portion of the diaphragm flexes in a first direction in response to pressure in the first chamber being greater than pressure in the second chamber. A portion of the diaphragm flexes in a second direction, opposite the first direction, in response to pressure in the second chamber being greater than pressure in the first chamber. The electrode is disposed in the first chamber and is fixed to the hub. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers.

REFERENCES:
patent: 3318153 (1967-05-01), Lode
patent: 3619742 (1971-11-01), Rud, Jr.
patent: 4084438 (1978-04-01), Lee et al.
patent: 4136603 (1979-01-01), Doyle, Jr.
patent: 4168518 (1979-09-01), Lee
patent: 4358814 (1982-11-01), Lee et al.
patent: 4434203 (1984-02-01), Briefer
patent: 4735090 (1988-04-01), Jeffrey et al.
patent: 4785669 (1988-11-01), Benson et al.
patent: 4823603 (1989-04-01), Ferran et al.
patent: 4977480 (1990-12-01), Nishihara
patent: 5020377 (1991-06-01), Park
patent: 5150275 (1992-09-01), Lee et al.
patent: 5155653 (1992-10-01), Kremidas
patent: 5279163 (1994-01-01), D'Antonio et al.
patent: 5442962 (1995-08-01), Lee
patent: 5499533 (1996-03-01), Miller et al.
Beynon, J.D.E. et al., "A Simple Micromanometer", Journal of Scientific Instruments, vol. 41, No. 2, Feb. 1964, pp. 111-112.
Cook, D.B. et al., "A Simple Diaphragm Micromanometer", Journal of Scientific Instruments, vol. 30, Jul. 1953, pp. 238-239.
Baratron.RTM. Absolute Pressure Transmitters 400 Series, .COPYRGT.1996 MKS Instruments, Inc., Andover, MA (No M.).
Baratron.RTM. General Purpose Absolute Pressure Transducers, 1993 MKS Instruments, Inc. (No. mo.).

Affiliated with

Also associated with

Rating

Capacitive based pressure sensor design does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive based pressure sensor design, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive based pressure sensor design will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-672788