Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-10-07
1998-11-10
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
058346430
ABSTRACT:
The present invention discloses a capacitive-type auto-sensing micro-probe used in high-sensitivity sensor elements. The micro-probe is constructed by semiconductor process technology using solid forming methods to comprise the elements of a probe, a probe cantilever, capacitors, an interface circuit and a signal processing circuit etc. and is fabricated in a micro chip so as to reduce the volume of the system, shorten the distance of signal transmission, and elevate signal sensitivity. By employing capacitive-type sensing principles, the micro-probe establishes capacitive plates on the top of the micro-probe to position at the corresponding capacitive plates located beneath an sensing substrate, and as the probe approaches the sample, the interaction of the sample reacts to the probe to generate deformation signals which, in sequence, are converted into capacitive variation signals. The signals are amplified to derive the surface characteristics of the sample.
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Brugger et al., "Microlever with Combined Intergrated Sensor/Actuator Functions for Scanning Force Microscopy", Sensors and Actuators A, vol. 43, 1994, pp. 339-345.
Joyce et al., "A New Force Sensor Incorporating Force-Feedback Control for Interfacial Force Microscopy", Rev. Sci. Instrum., vol. 62, No. 3, Mar. 1991, pp. 710-715.
Industrial Technology Research Institute
Larkin Daniel S.
Liauh W. Wayne
Williams Hezron E.
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