Capacitive accelerometer with separable damping and sensitivity

Details Capacitive accelerometer with separable damping and sensitivity Capacitive accelerometer with separable damping and sensitivity

1989-02-28

1990-05-29

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517AV, H01G 700, G01P 1508

Patent

active

049300423

ABSTRACT:
A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.

REFERENCES:
patent: 4574327 (1986-03-01), Wilner
patent: 4609968 (1986-09-01), Wilner
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn

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