Capacitive accelerometer with mid-plane proof mass

Details Capacitive accelerometer with mid-plane proof mass Capacitive accelerometer with mid-plane proof mass

1989-02-28

1991-04-16

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517R, G01P 1502, H01G 700

Patent

active

050087746

ABSTRACT:
A micromachined three-plate capacitive accelerometer incorporates a "sandwich" proof mass formed from two layers that are boron-doped to define hinges attached essentially to the midplane of the proof mass by being placed abutting a bonding interface region at the midplane.

REFERENCES:
patent: 4193291 (1980-03-01), Lynnworth
patent: 4244225 (1981-01-01), Greenwood
patent: 4574327 (1986-03-01), Wilner
patent: 4609968 (1986-09-01), Wilner
patent: 4658647 (1987-04-01), Shintani et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn

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