Capacitive accelerometer with liquid dielectric

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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C073S514180, C361S289000

Reexamination Certificate

active

06966225

ABSTRACT:
An accelerometer includes a capacitive sensing device and circuitry. The capacitive sensing device has electrode structures spaced by a gap for relative movement in response to a force applied to the capacitive sensing device to produce a displacement of the electrode structures. A liquid is disposed in the gap between the electrode structures. The circuitry is coupled to the capacitive sensing device for determining from the displacement an electric signal indicative of acceleration of the applied force.

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Abstracts, 46thAnnual Conference on Magnetism & Magnetism Materials, Seattle, Washington, Nov. 12-16, 2001.

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