Capacitive accelerometer with a circuit for correcting stray cap

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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7351432, 7386261, G01P 1513, G01P 2100, G01L 100

Patent

active

056000669

ABSTRACT:
An accelerometer includes a silicon capacitive detector and an electronic device for measuring the capacitive unbalance of the detector, providing an output voltage representative of the acceleration. To avoid the perturbations caused by the stray capacitances present in the detector, there is provided a compensation system for injecting into the measurement system a predetermined correcting electric signal so that the output voltage of the accelerometer is substantially proportional to the ratio between the difference and the sum of the capacitances of the detector's capacitors.

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