Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1991-05-22
1993-10-19
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
361280, G01P 15125
Patent
active
052535266
ABSTRACT:
The acceleration sensor has a first stationary substrate having a stationary electrode and a second stationary substrate having another stationary electrode and being opposed to the first stationary substrate with a given spacing. An electrically conductive diaphragm is disposed in the spacing and has a central segment fixed in the spacing through the pair of stationary substrates and a peripheral segment surrounding around and extending resiliently from the central segment to undergo displacement in the spacing relative to the stationary electrodes in response to an external acceleration force. The peripheral segment and the opposed stationary electrodes form variable capacitors effective to produce a capacitance change in response to the displacement of the peripheral segment to detect the external acceleration force.
REFERENCES:
patent: 3498138 (1970-03-01), Stewart
patent: 4393710 (1983-07-01), Bernard
patent: 4399705 (1983-08-01), Weiger et al.
patent: 4435737 (1984-03-01), Colton
patent: 4694687 (1987-09-01), Bonin et al.
patent: 5085079 (1992-02-01), Holdren et al.
patent: 5092174 (1992-03-01), Reidemeister et al.
Nakamura Shigekazu
Omura Atsushi
Takagi Masaaki
Chapman John E.
Copal Company Limited
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