Capacitive acceleration sensor system

Details Capacitive acceleration sensor system Capacitive acceleration sensor system

2007-10-30

2007-10-30

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

11073600

ABSTRACT:
An acceleration sensor system includes: a first and a second fixed electrodes; a movable electrode for providing a first and a second capacitors; a detection capacitor for detecting a capacitance difference between the first and the second capacitors; a charge voltage conversion circuit for converting a capacitance change of the detection capacitor to an output voltage; a detection bias voltage applying circuit; a vibrating circuit for vibrating the movable electrode such that a displacement bias voltage is applied in a first period and no displacement bias voltage is applied in a second period; a sampling circuit for sampling the output voltage during the second period when the movable electrode is constantly vibrated; and an acceleration signal generating and outputting circuit for generating an acceleration signal on the basis of a sampling result.

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Japanese Office Action issued from Japan Patent Office dated Jul. 11, 2007 in the corresponding Japanese Patent Application No. 2004-090409

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