Capacitive acceleration sensor arrangement

Details Capacitive acceleration sensor arrangement Capacitive acceleration sensor arrangement

2004-06-23

2008-03-11

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C324S661000

Reexamination Certificate

active

07340955

ABSTRACT:
The present invention relates to measuring devices used in measuring acceleration, and, more specifically, to capacitive acceleration sensors. The improved sensor arrangement of the invention enables reliable and effective measuring of acceleration, in small capacitive acceleration sensor designs, in particular. The acceleration sensor arrangement measuring circuitry of the present invention can also be applied for multi-terminal sensors, such as, for example, acceleration sensors with three axes, by using time division signal multiplexing.

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