Capacitive acceleration sensor

Details Capacitive acceleration sensor Capacitive acceleration sensor

2005-05-03

2005-05-03

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

06886405

ABSTRACT:
A capacitive acceleration sensor includes a non-single-crystal-silicon-based substrate, a polysilicon beam structure having a movable section that includes a movable electrode, a polysilicon supporter positioned on the non-single-crystal-silicon-based substrate for fixing the beam structure and forming a distance between the beam structure and the non-single-crystal-silicon-based substrate, a stationary electrode positioned on the non-single-crystal-silicon-based substrate and opposite to the movable section of the beam structure, and a thin film transistor (TFT) control circuit positioned on the non-single-crystal-silicon-based substrate. The stationary electrode and the movable electrode constitute a plate capacitor, and the TFT control circuit is electrically connected to the plate capacitor.

REFERENCES:
patent: 4873868 (1989-10-01), Pierre et al.
patent: 5604313 (1997-02-01), Cahill et al.
patent: 5780727 (1998-07-01), Gimzewski et al.
patent: 5792954 (1998-08-01), Corkum et al.
patent: 5801313 (1998-09-01), Horibata et al.
patent: 6263735 (2001-07-01), Nakatani et al.
patent: 6796181 (2004-09-01), Tanaka et al.
patent: 230237 (1994-09-01), None

Affiliated with

Also associated with

Rating

Capacitive acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive acceleration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3430575